Zero stand-off bonding system and method

ABSTRACT

A system and method for a zero stand-off configuration are provided. An embodiment comprises forming a seal layer over a conductive region that is part of a first substrate and breaching the seal with a conductive member of a second substrate in order to bond the first substrate to the second substrate.

This application is a divisional application of and claims the benefitof U.S. patent application Ser. No. 13/762,754, filed Feb. 8, 2013 andentitled “Zero Stand-Off Bonding System and Method,” which claims thebenefit of U.S. Provisional Application Ser. No. 61/747,008, filed onDec. 28, 2012, entitled “Zero Stand-Off Bonding System and Method,”which applications are hereby incorporated herein by reference.

BACKGROUND

Generally, a semiconductor device such as a semiconductor die may beconnected to other devices such as other semiconductor dies or,alternatively, may be connected to external devices using, for example,a package. The connection to other devices may be performed in a varietyof means to both physically and electrically connect the semiconductordevice to other devices. Some types of connection technology includeflip chip, solder balls, wired connections, or through silicon vias.

When a package is utilized, the package can provide an element ofprotection and support for the semiconductor device while also servingas an intermediary between the semiconductor device and devices externalto the semiconductor device. The semiconductor device may beelectrically and physically connected to the package through a varietyof means to transfer signals, power, and ground between the package andthe semiconductor device, with the package providing, for example,routing fan-out and other functions to receive and provide signals tothe semiconductor device.

In a package-on-package configuration, a first semiconductor device,such as a first semiconductor die may be connected to a first package tosupport and protect the first semiconductor device. A secondsemiconductor device, such as a second die may be connected to a secondpackage in order to protect the second semiconductor device. The firstpackage may then be bonded to the second package in order to physicallyand electrically connect the first semiconductor device to the secondsemiconductor device so that the first semiconductor device may workeither in conjunction with or concurrently with the second semiconductordevice.

BRIEF DESCRIPTION OF THE DRAWINGS

For a more complete understanding of the present embodiments, and theadvantages thereof, reference is now made to the following descriptionstaken in conjunction with the accompanying drawings, in which:

FIG. 1 illustrates a semiconductor device in accordance with anembodiment;

FIGS. 2A and 2B illustrate an underbump metallization on thesemiconductor device in accordance with an embodiment;

FIG. 3 illustrates an alignment of the semiconductor device and a secondsubstrate in accordance with an embodiment;

FIG. 4 illustrates a bonding of the semiconductor device and the secondsubstrate in a zero stand-off configuration in accordance with anembodiment;

FIG. 5 illustrates a zero stand-off configuration in a package onpackage configuration in accordance with an embodiment;

FIG. 6 illustrates a zero stand-off configuration in a package onpackage configuration without a molding compound in accordance with anembodiment; and

FIGS. 7A-7E illustrate an alternative method of forming an underbumpmetallization in accordance with an embodiment.

Corresponding numerals and symbols in the different figures generallyrefer to corresponding parts unless otherwise indicated. The figures aredrawn to clearly illustrate the relevant aspects of the embodiments andare not necessarily drawn to scale.

DETAILED DESCRIPTION OF ILLUSTRATIVE EMBODIMENTS

The making and using of the present embodiments are discussed in detailbelow. It should be appreciated, however, that the present disclosureprovides many applicable inventive concepts that can be embodied in awide variety of specific contexts. The specific embodiments discussedare merely illustrative of specific ways to make and use the disclosedsubject matter, and do not limit the scope of the different embodiments.

Embodiments will be described with respect to a specific context, namelya semiconductor die bonded to a package in a zero stand-offconfiguration. Other embodiments may also be applied, however, to otherbonding configurations.

With reference now to FIG. 1, there is shown a portion of asemiconductor die 100 including a semiconductor substrate 101 withmetallization layers 103, a contact pad 105, and a first passivationlayer 107. The semiconductor substrate 101 may comprise bulk silicon,doped or undoped, or an active layer of a silicon-on-insulator (SOI)substrate. Generally, an SOI substrate comprises a layer of asemiconductor material such as silicon, germanium, silicon germanium,SOI, silicon germanium on insulator (SGOI), or combinations thereof.Other substrates that may be used include multi-layered substrates,gradient substrates, or hybrid orientation substrates.

Active devices (not shown) may be formed on the semiconductor substrate101. As one of ordinary skill in the art will recognize, a wide varietyof active devices such as capacitors, resistors, inductors and the likemay be used to generate the desired structural and functionalrequirements of the design for the semiconductor die 100. The activedevices may be formed using any suitable methods either within or elseon the surface of the semiconductor substrate 101.

The metallization layers 103 are formed over the semiconductor substrate101 and the active devices and are designed to connect the variousactive devices to form functional circuitry. While illustrated in FIG. 1as a single layer, the metallization layers 103 may be formed ofalternating layers of dielectric (e.g., low-k dielectric material) andconductive material (e.g., copper) and may be formed through anysuitable process (such as deposition, damascene, dual damascene, etc.).In an embodiment there may be four layers of metallization separatedfrom the semiconductor substrate 101 by at least one interlayerdielectric layer (ILD), but the precise number of metallization layers103 is dependent upon the design of the semiconductor die 100.

The contact pad 105 may be formed over and in electrical contact withthe metallization layers 103. The contact pad 105 may comprise aluminum,but other materials, such as copper, may alternatively be used. Thecontact pad 105 may be formed using a deposition process, such assputtering, to form a layer of material (not shown) and portions of thelayer of material may then be removed through a suitable process (suchas photolithographic masking and etching) to form the contact pad 105.However, any other suitable process may be utilized to form the contactpad 105. The contact pad 105 may be formed to have a thickness ofbetween about 0.5 μm and about 4 μm, such as about 1.45 μm.

The first passivation layer 107 may be formed on the semiconductorsubstrate 101 over the metallization layers 103 and the contact pad 105.The first passivation layer 107 may be made of one or more suitabledielectric materials such as silicon oxide, silicon nitride, low-kdielectrics such as carbon doped oxides, extremely low-k dielectricssuch as porous carbon doped silicon dioxide, combinations of these, orthe like. The first passivation layer 107 may be formed through aprocess such as chemical vapor deposition (CVD), although any suitableprocess may be utilized, and may have a thickness between about 0.5 μmand about 5 μm, such as about 9.25 KÅ.

After the first passivation layer 107 has been formed, an opening may bemade through the first passivation layer 107 by removing portions of thefirst passivation layer 107 to expose at least a portion of theunderlying contact pad 105. The opening allows for contact between thecontact pad 105 and an underbump metallization (UBM) 201 (notillustrated in FIG. 1 but illustrated and discussed below with respectto FIG. 2). The opening may be formed using a suitable photolithographicmasking and etching process, although any suitable process to exposeportions of the contact pad 105 may be used.

FIGS. 2A and 2B illustrate that, once the contact pad 105 has beenexposed through the first passivation layer 107, the UBM 201 may beformed in electrical contact with the contact pad 105. In an embodimentthe UBM 201 may comprise copper or nickel, although any suitablematerial or combination of materials may alternatively be utilized. Forexample, in an alternative embodiment the UBM 201 may comprise threelayers of conductive materials, such as a layer of titanium, a layer ofcopper, and a layer of nickel. However, one of ordinary skill in the artwill recognize that there are many suitable arrangements of materialsand layers, such as an arrangement of chrome/chrome-copperalloy/copper/gold, an arrangement of titanium/titanium tungsten/copper,or an arrangement of copper/nickel/gold, that are suitable for theformation of the UBM 201. Any suitable materials or layers of materialthat may be used for the UBM 201 are fully intended to be includedwithin the scope of the current application.

The UBM 201 may be created by forming a layer of material over thecontact pad 105. The forming of each layer may be performed using aplating process, such as electroless plating, although other processesof formation, such as sputtering, evaporation, or PECVD process, mayalternatively be used depending upon the desired materials. By usingelectroless plating, the UBM 201 will selectively be formed on thecontact pad 105 and will not be formed over non-conductive regions, suchas the first passivation layer 107. As such, the UBM 201 will be formedto extend away from the contact pad 105 through the first passivationlayer 107 and extend away from the substrate 101. In an embodiment theUBM 201 may have a first height H₁ of between about 10 μm and about 100μm, such as about 15 μm, and a first width W₁ of between about 5 μm andabout 100 μm, such as about 30 μm.

FIG. 3 illustrates an alignment of the semiconductor die 100 to a seconddevice 300 for bonding in a zero stand-off flip chip packageconfiguration. In an embodiment in which the second device 300 is asemiconductor device, the second device 300 may comprise a secondsubstrate 301 of semiconductor material to form a second semiconductordie with active devices, metallization layers, and external contactsformed on the second substrate 301. In another embodiment in which thesecond device 300 is a package substrate, the second substrate 301 maybe a packaging substrate comprising internal interconnects to connectthe semiconductor die 100 to other external devices (not illustrated inFIG. 3).

In yet another embodiment, the second device 300 may be an interposerused as an intermediate substrate to connect the first semiconductordevice 100 to other external devices (not illustrated in FIG. 3). Insuch an embodiment the second substrate 301 may be, e.g., a siliconsubstrate, doped or undoped, or an active layer of asilicon-on-insulator (SOI) substrate. However, the second substrate 301may alternatively be a glass substrate, a ceramic substrate, a polymersubstrate, or any other substrate that may provide a suitable protectionand/or interconnection functionality. These and any other suitablematerials may alternatively be used for the second substrate 301 in thesecond device 300.

Over the second substrate 301 a connection mask 303 may be formed inorder to assist in the manufacturing and placement of a first externalconnection 305 onto the second substrate 301. In an embodiment theconnection mask 303 may be a solder mask used to mask portions of thesecond substrate 301 during the formation of the first externalconnection 305, and may be, e.g., a dielectric material such as siliconoxide formed using a CVD process and then patterned using, e.g., aphotolithographic masking and etching process to expose an electricalconnection.

However, as one of ordinary skill in the art will recognize, thedepositing and patterning of a dielectric material is merely onembodiment that may be utilized to form the connection mask 303.Alternatively, the connection mask 303 may comprise a liquid epoxyapplied using a silkscreen; a liquid photoimagable solder mask that isapplied, exposed, and developed; or a dry film photoimagable solder maskthat is laminated, exposed, and developed. These and any other suitablematerials may be applied and patterned to form the connection mask 303,and all such materials and processes are fully intended to be includedwithin the scope of the embodiments.

The first external connection 305 may be formed to provide an externalconnection between the second substrate 301 and the UBM 201. The firstexternal connection 305 may be, e.g. a layer of solder and may comprisea material such as tin or other suitable materials, such as silver orcopper. In an embodiment in which the first external connection 305 is atin solder material, the first external connection 305 may be formed byinitially forming a layer of tin into the openings of the connectionmask 303 through any suitable method such as evaporation,electroplating, printing, solder transfer, etc., to a preferredthickness of about 30 μm. In an embodiment the first external connection305 may be formed to have a second width W₂ of between about 20 μm andabout 300 μm, such as about 75 μm.

After the first external connection 305 has been formed, a seal layer307 is formed over the connection mask 303 and the first externalconnection 305. In an embodiment the seal layer 307 is utilized to tietogether the semiconductor device 100 and the second device 300 suchthat there is no gap and a zero stand-off between the semiconductordevice 100 and the second substrate 301. In an embodiment the seal layer307 is formed of a seal material such as an epoxy flux or non-conductivefilm that will protect as well as provide support for both thesemiconductor device 100 and the second device 300. In an embodiment inwhich the seal layer 307 is epoxy, the seal layer 307 may be formedusing a process such as CVD, printing, taping, or liquid spinning. Theseal layer 307 may be formed to a thickness of between about 10 μm andabout 50 μm, such as about 15 μm.

After the seal layer 307 has been formed over the connection mask 303and the first external connection 305, the semiconductor device 100 andthe second substrate 301 may be aligned with each other such that theUBM 201 is directly over the first external connection 305, with theseal layer 307 in between the UBM 201 and the first external connection305. This placement may be manual or automated, and may be performedwith the aid of alignment marks (not individually illustrated in FIG. 3)or other suitable methods of aligning the semiconductor device 100 withthe second device 300.

FIG. 4 illustrates that after the semiconductor device 100 has beenaligned with the second device 300, the semiconductor device 100 may bebonded to the second device 300 in a zero stand-off configuration. In anembodiment the bonding may be performed by initially heating thesemiconductor device 100 and the second device 300 (along with theirindividual structures such as the mask 303 and the first externalconnection 305) to a temperature greater than the melting point of theseal layer 307. In an embodiment in which the seal layer 307 is epoxy,the semiconductor device 100 and the seal layer 307 may be raised to atemperature greater than about 150° C., such as about 220° C.Optionally, the semiconductor device 100 and the second device 300 mayhave their temperature raised to temperature greater than the meltingpoint of the first external connection 305 in order to perform a reflowof the first external connection 305.

Alternatively, instead of raising the temperature of both thesemiconductor die 100 and the second device 300, heat may be selectivelyapplied to the seal layer 307 and, optionally, the first externalconnection 305. The selective application of heat may be utilized tosoften or liquefy the seal layer 307 and/or the first externalconnection 305 without necessitating the heating of the remainder of thestructures. As such, unnecessary heating and undesired physical results(e.g., thermal expansion mismatches and undesired material diffusion)may be minimized.

By raising the temperature of the seal layer 307 greater than themelting point of the seal layer 307, the seal layer 307 will soften orliquefy. Once the seal layer 307 has been softened or liquefied, the UBM201 may be pushed through the seal layer 307 to make contact with thefirst external connection 305. In an embodiment the UBM 201 may bepushed through the seal layer 307 by applying a pressure to either thesemiconductor device 100 or the second substrate 301, or both. Anysuitable pressure may alternatively be utilized.

With the seal layer 307 softened or liquefied and pressure beingapplied, the UBM 201 will extend through the seal layer 307 and comeinto physical and electrical contact with the first external connection305 of the second device 300. Additionally, in an embodiment in whichthe first external connection 305 has been heated to a temperaturegreater than its melting point, the UBM 201 will also extend into thefirst external connection 305, thereby making contact with the firstexternal connection 305 on multiple sides and sidewalls of the UBM 201.Once the UBM 201 has extended through the seal layer 307 and madecontact with the first external connection 305, the temperature of thesemiconductor device 100 and the second device 300 may be reduced belowthe melting point of the seal layer 307 and the first externalconnection 305, thereby solidifying the seal layer 307 and the firstexternal connection 305 and bonding the semiconductor device 100 to thesecond device 300.

Alternatively, the semiconductor device 100 and the second device 300may be bonded together using a thermal-compression bonding (TCB)technique. In such a technique the semiconductor device 100 and thefourth substrate 730 may be heated to a temperature greater than about150° C., such as about 220° C.

In an embodiment, while the UBM 201 is being pushed through the seallayer 307 and making contact with the first external connection 305, thefirst passivation layer 107 is making physical contact with the seallayer 307. By making physical contact between the first passivationlayer 107 and the seal layer 307, there is no gap between thesemiconductor device 100 and the second substrate 301, allowing for thezero stand-off configuration.

With this configuration, the semiconductor device 100 is in contact withthe seal layer 307 along the length of the seal layer 307, and both thesemiconductor device 100 and the second substrate 301 provide supportfor the connection between the UBM 201 and the first external connection305. With greater support, there will be less joint failure and lesswarpage around the connection, leading to an overall greater efficiencyand yield during a production process. Additionally, with zerostand-off, the overall structure may be made smaller and thinner,leading to an overall reduction in the size of the device.

FIG. 5 illustrates another embodiment in which the semiconductor device100 and the second device 300 have been utilized in a package on package(PoP) configuration. In this embodiment, additional processing has beenperformed on the second substrate 301 to include both a second externalconnection 501 on a first side 502 of the second substrate and toinclude third external connections 503 on a second side 504 of thesecond substrate 301. In an embodiment the third external connections503 may be formed to provide external connection between the secondsubstrate 301 and external devices (not individually illustrated in FIG.5). The third external connections 503 may be contact bumps such asmicrobumps or controlled collapse chip connection (C4) bumps and maycomprise a material such as tin, or other suitable materials, such assilver or copper. In an embodiment in which the third externalconnections 503 are tin solder bumps, the third external connections 503may be formed by initially forming a layer of tin through any suitablemethod such as evaporation, electroplating, printing, solder transfer,ball placement, etc., to a preferred thickness of about 100 μm. Once alayer of tin has been formed on the structure, a reflow is preferablyperformed in order to shape the material into the desired bump shape.

On the first side 502 of the second substrate 301, a second externalconnection 501 may be formed to provide electrical connectivity betweena second contact pad 506 on the second substrate 301 and a secondpackage 505. In an embodiment the second contact pad 506 may be, e.g., asimilar material and formed from similar processes as the first contactpad 105 described above with respect to FIG. 1. However, the secondcontact pad 506 may alternatively be a different material and formedusing different processes than the first contact pad 105. Any suitableelectrical connection may alternatively be utilized for the secondcontact pad 506.

In an embodiment the second external connection 501 may be a copper bumpto provide connection between the second substrate 301 and the secondpackage 505. The copper bump may be formed of copper and may be placedon the second contact pad 506 using, e.g., an automated placement tool.Alternatively, the second external connection 501 may be a solder bumpformed by placing a layer of solder material onto the second contact pad506 and then reflowed to form the desired bump shape. Any suitablematerial and method may alternatively be used to provide an electricalconnection to the first side 502 of the second substrate 301.

Once the second external connection 501 has been placed or otherwiseformed, an encapsulant 511 may be placed over the semiconductor device100 and the second device 300 in order to provide support and protectionto the semiconductor device 100 and the second device 300. In anembodiment the encapsulant 511 may be a molding compound and may beplaced using a molding device. For example, the semiconductor device 100and the second device 300 may be placed within a cavity of the moldingdevice, and the cavity may be hermetically sealed. The encapsulant 511may be placed within the cavity either before the cavity is hermeticallysealed or else may be injected into the cavity through an injectionport. In an embodiment the encapsulant 511 may be a molding compoundresin such as polyimide, PPS, PEEK, PES, a heat resistant crystal resin,combinations of these, or the like.

Once the encapsulant 511 has been placed into the cavity such that theencapsulant 511 encapsulates the region around the semiconductor device100 and the second device 300, the encapsulant 511 may be cured in orderto harden the encapsulant 511 for optimum protection. While the exactcuring process is dependent at least in part on the particular materialchosen for the encapsulant 511, in an embodiment in which moldingcompound is chosen as the encapsulant 511, the curing could occurthrough a process such as heating the encapsulant 511 to between about100° C. and about 130° C., such as about 125° C. for about 60 sec toabout 3000 sec, such as about 600 sec. Additionally, initiators and/orcatalysts may be included within the encapsulant 511 to better controlthe curing process.

However, as one having ordinary skill in the art will recognize, thecuring process described above is merely an exemplary process and is notmeant to limit the current embodiments. Other curing processes, such asirradiation or even allowing the encapsulant 511 to harden at ambienttemperature, may alternatively be used. Any suitable curing process maybe used, and all such processes are fully intended to be included withinthe scope of the embodiments discussed herein.

The second package 505 may comprise a third substrate 513, a secondsemiconductor device 515, a second passivation layer 519, a thirdcontact pad 521, a second encapsulant 523, and a fourth externalconnection 525. In an embodiment the third substrate 513 may be similarto the second substrate 301 described above with respect to FIG. 3. Forexample, the third substrate 301 may be a semiconductor, glass, orceramic substrate, and may be either a package or an interposer type ofsubstrate. However, the third substrate 513 may alternatively bedifferent from the second substrate 301.

The second semiconductor device 515 may be similar to the firstsemiconductor device 100 described above with respect to FIG. 1. Forexample, the second semiconductor device 515 may be a semiconductordevice with a semiconductor substrate, active devices, and metallizationlayers (not individually illustrated in FIG. 5) that is designed andmanufactured to work in conjunction with or concurrently with thesemiconductor device 100 through the second device 300. However, thesecond semiconductor device 515 may alternatively be different from thesemiconductor device 100, and any suitable device may alternatively beutilized.

The second passivation layer 519 may be formed to protect the thirdsubstrate 513 and may be, e.g., a similar material formed by a similarprocess as the first passivation layer 107. For example, the secondpassivation layer 519 may be dielectric material formed using chemicalvapor deposition. However, the second passivation layer 519 may bedifferent from the first passivation layer 107, and all suitablematerials and methods of formation are fully intended to be includedwithin the scope of the embodiments.

The third contact pad 521 may be formed on the third substrate 513 toform an electrical connection between the second semiconductor device515 and, e.g., the second external connection 501. In an embodiment thethird contact pad 521 may be a similar material and formed from similarprocesses as the first contact pad 105 described above with respect toFIG. 1, such as an aluminum contact pad. However, the third contact pad521 may alternatively be a different material and formed using differentprocesses than the first contact pad 105. Any suitable electricalconnection may alternatively be utilized for the third contact pad 521.

The second encapsulant 523 may be used to encapsulate and protect thesecond semiconductor device 515 and the third substrate 513. In anembodiment the second encapsulant 523 may comprise similar materials andmay be applied in a similar fashion as the first encapsulant 511. Forexample, the second encapsulant 523 may be a molding compound applied tothe second semiconductor device 515 and the third substrate 513 using amolding chamber. However, the second encapsulant 523 may be differentfrom the first encapsulant 511 and all such materials are fully intendedto be included in the scope of the embodiments.

In an embodiment the fourth external connection 525 may be formed toprovide an external connection between the third substrate 513 and thesecond external connection 501. The fourth external connection 525 maybe a contact bump such as a microbump or a controlled collapse chipconnection (C4) bump and may comprise a material such as tin, or othersuitable materials, such as silver or copper. In an embodiment in whichthe fourth external connection 525 is a tin solder bump, the fourthexternal connection 525 may be formed by initially forming a layer oftin through any suitable method such as evaporation, electroplating,printing, solder transfer, ball placement, etc., to a preferredthickness of about 100 μm. Once a layer of tin has been formed on thestructure, a reflow is preferably performed in order to shape thematerial into the desired bump shape.

Once formed, the fourth external connection 525 is aligned with thesecond external connection 503 and the second substrate 301 may bebonded to the second package 505 by placing the fourth externalconnection 525 in contact with the second external connection 503. Oncein place, a reflow process is performed, such as by heating the fourthexternal connection 525 and applying a pressure such that the fourthexternal connection 525 and the second external connection 503physically bond with each other and form a physical and electrical bond.

FIG. 6 illustrates another embodiment in which a zero stand-offconfiguration may be utilized. In this configuration, the firstencapsulant 511 is not utilized and the second external connection 501,instead of being a copper ball, is a solder ball. By foregoing the firstencapsulant 511 and using a solder ball instead of a copper ball, thezero stand-off package-on-package configuration may be manufactured fora cheaper amount than the more expensive copper ball and encapsulationprocess described above.

FIGS. 7A-7E illustrate another embodiment which may be used in order toform the UBM 201 for use in a wafer level chip scale packaging (WLCSP)configuration. In this embodiment the substrate 101, the metallizationlayers 103, the first contact pad 105, and the first passivation layer107 may all be formed as described above with respect to FIG. 1.However, in this embodiment, and as shown in FIG. 7A, a thirdpassivation layer 701, a post passivation interconnect (PPI) 703, afourth passivation layer 705, a fifth passivation layer 707, a sixthpassivation layer 709, a seed layer 711, and a first UBM section 713 maybe formed over the first contact pad 105. In an embodiment the thirdpassivation layer 701 may be formed over the contact pad 105 and thefirst passivation layer 107. The third passivation layer 701 may beformed from a polymer such as polyimide. Alternatively, the thirdpassivation layer 701 may be formed of a material similar to thematerial used as the first passivation layer 107, such as siliconoxides, silicon nitrides, low-k dielectrics, extremely low-kdielectrics, combinations of these, and the like. The third passivationlayer 701 may be formed to have a thickness between about 2 μm and about15 μm, such as about 5 μm.

After the third passivation layer 701 has been formed, an opening may bemade through the third passivation layer 701 by removing portions of thethird passivation layer 701 to expose at least a portion of theunderlying contact pad 105. The opening allows for contact between thecontact pad 105 and the PPI 703 (discussed further below). The openingmay be formed using a suitable photolithographic mask and etchingprocess, although any suitable process to expose portions of the contactpad 105 may be used.

After the contact pad 105 has been exposed, the PPI 703 may be formed toextend along the third passivation layer 701. The PPI 703 may beutilized as a redistribution layer to allow the first UBM section 713that is electrically connected to the contact pad 105 to be placed inany desired location on the semiconductor device 100, instead oflimiting the location of the first UBM section 713 to the regiondirectly over the contact pad 105. In an embodiment the PPI 703 may beformed by initially forming a seed layer (shown with a dashed line inFIG. 7A) of a titanium copper alloy through a suitable formation processsuch as CVD or sputtering. A photoresist (not shown) may then be formedto cover the seed layer, and the photoresist may then be patterned toexpose those portions of the seed layer that are located where the PPI703 is desired to be located.

Once the photoresist has been formed and patterned, a conductivematerial, such as copper, may be formed on the seed layer through adeposition process such as plating. The conductive material may beformed to have a thickness of between about 1 μm and about 10 μm, suchas about 5 μm, and a width along the substrate 101 of between about 5 μmand about 300 μm, such as about 15 μm. However, while the material andmethods discussed are suitable to form the conductive material, thesematerials are merely exemplary. Any other suitable materials, such asAlCu or Au, and any other suitable processes of formation, such as CVDor PVD, may alternatively be used to form the PPI 703.

Once the conductive material has been formed, the photoresist may beremoved through a suitable removal process such as ashing. Additionally,after the removal of the photoresist, those portions of the seed layerthat were covered by the photoresist may be removed through, forexample, a suitable etch process using the conductive material as amask.

Once the PPI 703 has been formed, the fourth passivation layer 705, thefifth passivation layer 707, and the sixth passivation layer 709 may beformed to collectively protect the PPI 703 and the other underlyingstructures. The fourth passivation layer 705, the fifth passivationlayer 707, and the sixth passivation layer 709 may each be formed of adielectric material, such as polyimide, silicon oxide, silicon nitride,a low-k dielectric, an extremely low-k dielectric, combinations ofthese, and the like, and may be formed or applied to the PPI 703 using asuitable manufacturing process depending upon the material desired foreach layer. For example, in an embodiment in which the fifth passivationlayer 707 is polyimide and the sixth passivation layer 709 is siliconnitride, the fifth passivation layer 707 may be applied using a spin-onprocess, while the sixth passivation layer 709 may be formed using a CVDprocess. Any suitable materials and methods of formation, and anysuitable combination of materials and methods of formation, may beutilized to form the fourth passivation layer 705, the fifth passivationlayer 707, and the sixth passivation layer 709, and all such materialsand methods are fully intended to be included within the scope of theembodiments.

After the fourth passivation layer 705, the fifth passivation layer 707,and the sixth passivation layer 709 have been formed, a PPI opening 710may be made through the fourth passivation layer 705, the fifthpassivation layer 707, and the sixth passivation layer 709 by removingportions of the fourth passivation layer 705, the fifth passivationlayer 707, and the sixth passivation layer 709 to expose at least aportion of the underlying PPI 703. The PPI opening 710 allows forcontact between the first UBM section 713 and the PPI 703. The PPIopening 710 may be formed using a suitable photolithographic mask andetching process, although any suitable process to expose portions of thePPI 703 may alternatively be used.

Once the PPI 703 has been exposed through the fourth passivation layer705, the fifth passivation layer 707, and the sixth passivation layer709, the first UBM section 713 may be formed in electrical contact withthe PPI 703. The first UBM section 713 may comprise one or more layersof conductive materials, such as copper or nickel, or a combination oflayers, such as a layer of titanium, a layer of copper, and a layer ofnickel. However, one of ordinary skill in the art will recognize thatthere are many suitable arrangements of materials and layers, such as anarrangement of chrome/chrome-copper alloy/copper/gold, an arrangement oftitanium/titanium tungsten/copper, or an arrangement ofcopper/nickel/gold, that are suitable for the formation of the first UBMsection 713. Any suitable materials or layers of material that may beused for the first UBM section 713 are fully intended to be includedwithin the scope of the current application.

The first UBM section 713 may be created by first forming a seed layer711 over the fourth passivation layer 705, the fifth passivation layer707, and the sixth passivation layer 709, and along the interior of thePPI opening 710. Subsequent material for the first UBM section 713 maybe formed using a plating process, such as electrochemical plating,although other processes of formation, such as sputtering, evaporation,or PECVD process, may alternatively be used depending upon the desiredmaterials. The first UBM section 713 may be formed to have a thicknessthat fills and overfills the PPI opening 710. Once the desired layershave been formed, portions of the seed layer 711 and material outside ofthe PPI opening 710 may then be removed using a suitable planarizationprocess, such as a chemical mechanical polish (CMP).

FIG. 7B illustrates a formation and patterning of a first photoresist715 over the first UBM section 713. In an embodiment the firstphotoresist 715 may comprise a conventional photoresist material, suchas a deep ultra-violet (DUV) photoresist, and may be deposited on thesurface of the first UBM section 713, for example, by using a spin-onprocess to place the first photoresist 715. However, any other suitablematerial or method of forming or placing the first photoresist 715 mayalternatively be utilized.

Once the first photoresist 715 has been placed on the first UBM section713, the first photoresist 715 may be exposed to energy, e.g. light,through a patterned reticle in order to induce a reaction in thoseportions of the first photoresist 715 exposed to the energy. The firstphotoresist 715 may then be developed, and portions of the firstphotoresist 715 may be removed, exposing a surface of the first UBMsection 713 to form a second UBM section 717 (not illustrated in FIG. 7Bbut illustrated and discussed below with respect to FIG. 7C). In anembodiment the development of the first photoresist 715 may form anopening with a third width W₃ of between about 5 μm and about 100 μm,such as about 30 μm.

FIG. 7C illustrates a formation of the second UBM section 717 within theopening of the first photoresist 715 and physically and electricallyconnected to the first UBM section 713. In an embodiment the second UBMsection 717 may comprise similar materials as the first UBM section 713and may be made using similar processes. For example, the second UBMsection 717 may be nickel or copper formed using an electroless platingprocess to fill and overfill the opening through the first photoresist715. Once the opening through the first photoresist 715 has beenoverfilled, a planarization process (e.g., CMP) may be used to removeexcess material outside of the opening to form the second UBM section717. In an embodiment the second UBM section 717 may have a secondheight H₂ of between about 10 μm and about 100 μm, such as about 15 μm.

FIG. 7D illustrates a removal of the first photoresist 715. In anembodiment the first photoresist 715 may be removed using an ashingprocess, whereby the temperature of the first photoresist 715 isincreased until it chemically degrades and may be removed. However, anyother suitable removal process, such as etching or dissolving the firstphotoresist 715, may alternatively be utilized.

FIG. 7E illustrates the use of the first UBM section 713 and the secondUBM section 717 in a zero stand-off wafer level chip scale packagingconfiguration to connect the semiconductor device 100 to a third device729. In an embodiment the third device 729 may comprise a fourthsubstrate 730, which may be a third semiconductor substrate to form athird semiconductor die with active devices, metallization layers, andexternal contacts formed on the third semiconductor substrate.

Alternatively, the fourth substrate 730 may comprise an interposer usedas an intermediate substrate to connect the first semiconductor device100 to other external devices (not illustrated in FIG. 7E). In such anembodiment the fourth substrate 730 may be, e.g., a silicon substrate,doped or undoped, or an active layer of a silicon-on-insulator (SOI)substrate. However, the fourth substrate 730 may alternatively be aglass substrate, a ceramic substrate, a polymer substrate, or any othersubstrate that may provide a suitable protection and/or interconnectionfunctionality. These and any other suitable materials may alternativelybe used for the fourth substrate 730.

Over the fourth substrate 730 the connection mask 303, the firstexternal connection 305 and the seal layer 307 may be formed. Once theconnection mask 303, the first external connection 205 and the seallayer 307 have been formed, the semiconductor device 100 may be bondedto the fourth substrate 730 in a zero stand-off configuration by placingthe second UBM section 717 in contact with the seal layer 307 over thefirst external connection 305. Once in place, the seal layer 307 isheated to a temperature greater than its melting point and pressure isapplied. With the seal softened or liquefied, the second UBM section 717breaches the seal layer 307 and comes into contact with the firstexternal connection 305, thereby bonding the semiconductor device 100 tothe fourth substrate 730.

Additionally, while the second UBM section 717 is extending through theseal layer 307 and making contact with the first external connection305, the sixth passivation layer 709 is making physical contact with theseal layer 307. By making physical contact between the sixth passivationlayer 709 and the seal layer 307, there is no gap between thesemiconductor device 100 and the fourth substrate 730, allowing for thezero stand-off configuration. With this configuration, both thesemiconductor device 100 and the fourth substrate 730 provide supportfor the connection between the second UBM section 717 and the firstexternal connection 305. With greater support, there will be less jointfailure and less warpage around the connection, leading to an overallgreater efficiency and yield during a production process. Additionally,with zero stand-off, the overall structure may be made smaller andthinner, leading to an overall reduction in the size of the device.

In accordance with an embodiment, a method for bonding a semiconductordevice comprising forming a seal over an electrical region of a firstsubstrate is provided. A second substrate is bonded to the firstsubstrate by breaching the seal with a conductive extension extendingaway from the second substrate.

In accordance with another embodiment, a method for bonding asemiconductor device comprising forming a seal on a first substrate, theseal overlying a conductive region, and heating the seal to atemperature greater than its melting point is provided. The seal isbreached with a conductive member such that the conductive member is inphysical contact with the conductive region, the conductive member beingelectrically connected to a second substrate, and the seal is cooled toa temperature below its melting point to bond the first substrate to theconductive member in a zero stand-off configuration.

In accordance with yet another embodiment, a semiconductor devicecomprising a first substrate with a first UBM extending away from thefirst substrate is provided. A second substrate is bonded to the firstsubstrate, the second substrate comprising a seal, the first UBMextending through the seal to make contact with a conductive region ofthe second substrate, the seal in physical contact with the firstsubstrate along the length of the seal.

Although the present embodiments and their advantages have beendescribed in detail, it should be understood that various changes,substitutions and alterations can be made herein without departing fromthe spirit and scope of the disclosure as defined by the appendedclaims. For example, the precise materials utilized for the seal layermay be modified while still remaining within the scope of theembodiments. Further, the precise methods of formation and bondingdescribed herein may also be modified while still remaining within thescope of the embodiments.

Moreover, the scope of the present application is not intended to belimited to the particular embodiments of the process, machine,manufacture, composition of matter, means, methods and steps describedin the specification. As one of ordinary skill in the art will readilyappreciate from the disclosure, processes, machines, manufacture,compositions of matter, means, methods, or steps, presently existing orlater to be developed, that perform substantially the same function orachieve substantially the same result as the corresponding embodimentsdescribed herein may be utilized according to the present disclosure.Accordingly, the appended claims are intended to include within theirscope such processes, machines, manufacture, compositions of matter,means, methods, or steps.

What is claimed is:
 1. A semiconductor device comprising: a first devicewith a first underbump metallization (UBM) extending away from the firstdevice; and a second device bonded to the first device, the seconddevice comprising: a dielectric mask on a substrate, the dielectric maskpatterned with an opening exposing the substrate; a conductive region inthe opening; and a seal over the dielectric mask and the conductiveregion, the seal in physical contact with the first device along alength of the seal, the seal different from the dielectric mask, thefirst UBM extending through the seal and at least partially contactingthe conductive region on multiple sides of the first UBM.
 2. Thesemiconductor device of claim 1, wherein the conductive region is alayer of solder.
 3. The semiconductor device of claim 1, wherein theseal is an epoxy.
 4. The semiconductor device of claim 1, wherein thefirst device is a semiconductor die and the second device is a package.5. The semiconductor device of claim 1, further comprising anencapsulant encapsulating both the first device and the second device.6. The semiconductor device of claim 1, wherein the second device is aninterposer.
 7. A semiconductor device comprising: a first substrate, thefirst substrate having a first width; a first reflowable material on thefirst substrate; a seal layer extending over the first reflowablematerial and coterminous with a first side of the first substrate and asecond side of the first substrate; a second substrate having a secondwidth less than the first width; and a first external contact on thesecond substrate, wherein the first external contact extends from thesecond substrate to the first reflowable material through the seallayer.
 8. The semiconductor device of claim 7, further comprising asecond external contact on the first substrate, wherein the secondexternal contact is laterally removed from the second substrate.
 9. Thesemiconductor device of claim 8, further comprising a semiconductorpackage electrically connected to the second external contact, whereinthe second substrate is located between the semiconductor package andthe first substrate.
 10. The semiconductor device of claim 9, whereinthe semiconductor package further comprises a semiconductor device. 11.The semiconductor device of claim 7, wherein the first substrate is apackaging substrate.
 12. The semiconductor device of claim 7, furthercomprising an encapsulant over the first substrate and the secondsubstrate.
 13. The semiconductor device of claim 7, wherein the secondsubstrate is in physical contact with the seal layer.
 14. Thesemiconductor device of claim 7, wherein the first external contactcomprises copper.
 15. A semiconductor device comprising: a firstsubstrate; a first external contact extending away from the firstsubstrate through a seal layer; a second substrate on an opposite sideof the seal layer from the first substrate; a reflowable materialbetween the second substrate and the seal layer, wherein the firstexternal contact extends through the seal layer and into the reflowablematerial to be in physical contact with the reflowable material; adielectric mask interposed between the second substrate and the seallayer, the dielectric mask surrounding the reflowable material, thedielectric mask different from the seal layer; a third substrate on anopposite side of the first substrate than the second substrate; and asecond external contact extending from the third substrate to the secondsubstrate through the seal layer.
 16. The semiconductor device of claim15, wherein the third substrate is a package substrate.
 17. Thesemiconductor device of claim 16, wherein the package substrate furthercomprises a semiconductor device.
 18. The semiconductor device of claim15, wherein the first external contact comprises copper.
 19. Thesemiconductor device of claim 15, wherein the second external contactcomprises solder.
 20. The semiconductor device of claim 15, wherein thefirst substrate is in physical contact with the seal layer.